ProbeSense
MPI Temperature Calibration Sensor
- Verify the temperature specification of any ERS thermal chuck of 200 or 300 mm size
- One sensor – no accuracy deviation
- Calibration in the same conditions as probing
- Calibrated according to ISO17025:2017
- ITS90 traceability
- Annual wafer calibration service
- Temperature range: -40 to 200 °C
- Sensor accuracy: < 0.03 K
- Sensor type: 4 wire PT100
- Connectivity: USB
The ProbeSense a product be ERS and MPI is an unique temperature calibration tool, that consists of only one sensor. It is mounted in the probe card position of the prober and connected to a calibration instrument, where accuracy below 30mK can be reached. The MPI SENTIO probe system operating environment supports a fully automated calibration process.
SENTIO Integration
With SENTIO up to 10 temperatures at an unlimited number of test points on the chuck can be defined and executed. This would allow the probe system to run operator independent calibration procedures.
Traceable Calibration
ProbeSense is calibrated according to ISO17025:2017 and we offer regular recalibrations in a local, certified lab for maintaining ITS90 traceability
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