For this purpose, ATV designed a fully automatic machine consisting of measuring equipment and wafer probers. It has been precisely designed for the specific requirements of the customer. The focus was on fully automatic, repeatable, and fast defect measurement and evaluation of the components. A test system with a modular design, consisting of a TS2500-RF by MPI, measuring equipment by Keithley and a probe card by Celadon finally provided the desired solution. The combination of the selected measurement components is capable to control both the prober for charging, aligning, contacting, and discharging the wafer and to perform the measurement of the individual components. Furthermore, easy integration, handling, and storage of the measurement data within the production process was important for the customer. This was achieved by an individually configured Measmatic software application. In addition, a SECS/GEM interface enables current status queries throughout the process and ensures reliable data transmission.