MPI Fully Automated Systems

The TS2000 and the TS3000 are automated probe systems which can be configured with ambient to hot chucks up to 300°C.The TS2000-SE and the TS3000-SE can be configured at extended temperature ranges from -60 °C to +300 °Cand whereTS200-SE is the advanced probe system equipped with automated single wafer loader for convenient wafer swap at any temperature. The SE stands for MPI ShielDEnvironment™ -  a local environment chamber providing an excellent EMI- and light-tight shielding for ultra-low noise measurements.